STRESS ERRORS ASSOCIATED WITH MINIATURIZATION OF psi ASSEMBLY X-RAY STRESS ANALYZERS

Using a model and a simulation method, the problems caused by miniaturization of goniometers are discussed from the viewpoint of the stress error caused by systematic errors including the mis-setting of the specimen and the misalignments of the collimator and detector of the Ψ assembly X-ray stress analyzer with a position sensitive detector. As a concluion, it was found that stress errors increase with decreasing goniometer size, and it is believed that the goniometer size could be optimized by the approach adopted in this study.